Nonvolatile memory device

ABSTRACT

A nonvolatile memory device includes a first semiconductor layer including an upper substrate in which word-lines extending in a first direction and bit-lines extending in a second direction are disposed and a memory cell array, a second semiconductor layer, a control circuit, and a pad region. The memory cell array includes a vertical structure on the upper substrate, and the vertical structure includes memory blocks. The second semiconductor layer includes a lower substrate that includes address decoders and page buffer circuits. The vertical structure includes via areas in which one or more through-hole vias are provided, and the via areas are spaced apart in the second direction. The memory cell array includes mats corresponding to different bit-lines of the bit-lines. At least two of the mats include a different number of the via areas according to a distance from the pad region in the first direction.

CROSS-REFERENCE TO RELATED APPLICATION

This U.S. patent application claims priority under 35 U.S.C. § 119 toKorean Patent Application No. 10-2019-0148349, filed on Nov. 19, 2019 inthe Korean Intellectual Property Office (KIPO), the disclosure of whichis incorporated by reference herein in its entirety.

TECHNICAL FIELD

Exemplary embodiments of the inventive concept relate generally tomemory devices, and more particularly to nonvolatile memory devices.

DISCUSSION OF RELATED ART

Semiconductor memory devices may be volatile or nonvolatile. Flashmemory devices are typically nonvolatile semiconductor memory devices.Flash memory devices may be used as a voice and image data storingmedium for information appliances, such as a computer, a cellular phone,a personal digital assistant (PDA), a digital camera, a handheldpersonal computer (PC), or the like.

Recently, nonvolatile memory devices having memory cells that arestacked in three dimensions have been researched to improve integrity ofthe nonvolatile memory devices. As information communication devices arebeing developed to have multitudes of functions, memories for suchdevices may require a large capacity and a high degree of integration.As memory cell sizes decrease to achieve high integration, thestructural complexity of operation circuits and/or wirings included inthe memory devices can degrade electrical characteristics.

SUMMARY

According to an exemplary embodiment of the inventive concept, anonvolatile memory device includes a first semiconductor layer, a secondsemiconductor layer, a control circuit, and a pad region. The firstsemiconductor layer includes an upper substrate in which a plurality ofword-lines extending in a first direction and a plurality of bit-linesextending in a second direction perpendicular to the first direction aredisposed and a memory cell array including a vertical structure on theupper substrate, and the vertical structure includes a plurality ofmemory blocks. The second semiconductor layer is disposed under thefirst semiconductor layer in a third direction perpendicular to thefirst and second directions, and includes a lower substrate thatincludes a plurality of address decoders and a plurality of page buffercircuits configured to control the memory cell array. The controlcircuit controls the plurality of address decoders and the plurality ofpage buffer circuits in response to a command and an address from anexternal device. The pad region is disposed adjacent to the firstsemiconductor layer in the first direction and extends in the seconddirection. The vertical structure includes a plurality of via areas inwhich one or more through-hole vias are provided and the plurality ofvia areas are spaced apart in the second direction. The memory cellarray includes a plurality of mats corresponding to different bit-linesof the plurality of bit-lines. At least two of the plurality of matsinclude a different number of the via areas according to a distance fromthe pad region in the first direction.

According to an exemplary embodiment of the inventive concept, anonvolatile memory device includes a first semiconductor layer, a secondsemiconductor layer, a control circuit, and a pad region. The firstsemiconductor layer includes an upper substrate in which a plurality ofword-lines extending in a first direction and a plurality of bit-linesextending in a second direction perpendicular to the first direction aredisposed and a memory cell array including a vertical structure on theupper substrate, and the vertical structure includes a plurality ofmemory blocks. The second semiconductor layer is disposed under thefirst semiconductor layer in a third direction perpendicular to thefirst and second directions, and includes a lower substrate thatincludes a plurality of address decoders and a plurality of page buffercircuits configured to control the memory cell array. The controlcircuit controls the plurality of address decoders and the plurality ofpage buffer circuits in response to a command and an address from anexternal device. The pad region is disposed adjacent to the firstsemiconductor layer in the first direction and extends in the seconddirection. The vertical structure includes a plurality of via areas inwhich one or more through-hole vias are provided and the plurality ofvia areas are spaced apart in the second direction. At least a firstportion of the one or more through-hole vias connect at least someportion of the plurality of bit-lines to at least some portion of theplurality of page buffer circuits. At least a second portion of the oneor more through-hole vias connect at least some portion of the pluralityof word-lines to at least some portion of the plurality of addressdecoders. The memory cell array includes a plurality of matscorresponding to different bit-lines of the plurality of bit-lines. Eachof the plurality of mats includes a first tile and a second tile whichare identified based on a distance from the pad region in the firstdirection. The first tile and the second tile include a different numberof the via areas according to the distance from the pad region in thefirst direction.

According to an exemplary embodiment of the inventive concept, anonvolatile memory device includes a first semiconductor layer, a secondsemiconductor layer, a control circuit, and a pad region. The firstsemiconductor layer includes an upper substrate in which a plurality ofword-lines extending in a first direction and a plurality of bit-linesextending in a second direction perpendicular to the first direction aredisposed and a memory cell array including a vertical structure on theupper substrate, and the vertical structure includes a plurality ofmemory blocks. The second semiconductor layer is disposed under thefirst semiconductor layer in a third direction perpendicular to thefirst and second directions, and includes a lower substrate thatincludes a plurality of address decoders and a plurality of page buffercircuits configured to control the memory cell array. The controlcircuit controls the plurality of address decoders and the plurality ofpage buffer circuits in response to a command and an address from anexternal device. The pad region is disposed adjacent to the firstsemiconductor layer in the first direction and extends in the seconddirection. A plurality of input/output pads and at least one power padare provided in the pad region. The vertical structure includes aplurality of via areas in which one or more through-hole vias areprovided and the plurality of via areas are spaced apart in the seconddirection. The at least one power pad is disposed adjacent to a firstedge portion of the pad region. The memory cell array includes aplurality of mats corresponding to different bit-lines of the pluralityof bit-lines. At least two of the plurality of mats include a differentnumber of the via areas according to a distance from the at least onepower pad in the second direction.

BRIEF DESCRIPTION OF THE DRAWINGS

The above and other features of the inventive concept will be moreclearly understood by describing in detail exemplary embodiments thereofwith reference to the accompanying drawings.

FIG. 1 is a block diagram illustrating a storage device according to anexemplary embodiment of the inventive concept.

FIG. 2 is a block diagram illustrating a memory controller in thestorage device of FIG. 1 according to an exemplary embodiment of theinventive concept.

FIG. 3 is a block diagram illustrating a nonvolatile memory device inthe storage device of FIG. 1 according to an exemplary embodiment of theinventive concept.

FIG. 4 is a view illustrating a structure of a nonvolatile memory deviceof FIG. 3 according to an exemplary embodiment of the inventive concept.

FIG. 5 is a perspective view illustrating a memory block of FIG. 3according to an exemplary embodiment of the inventive concept.

FIG. 6 is an equivalent circuit diagram illustrating the memory block ofFIG. 5 according to an exemplary embodiment of the inventive concept.

FIG. 7 illustrates a cell region in which a memory cell array of FIG. 3is formed according to an exemplary embodiment of the inventive concept.

FIGS. 8A and 8B illustrate cross-sections of strings of memory blocks ofFIG. 7, according to exemplary embodiments of the inventive concept.

FIG. 9 is a block diagram illustrating a control circuit in thenonvolatile memory device of FIG. 3 according to an exemplary embodimentof the inventive concept.

FIG. 10 is a block diagram illustrating a voltage generator in thenonvolatile memory device of FIG. 3 according to an exemplary embodimentof the inventive concept.

FIG. 11 is a plan view illustrating an upper surface of a secondsemiconductor layer in FIG. 4 according to an exemplary embodiment ofthe inventive concept.

FIG. 12 is a plan view illustrating an upper surface of the secondsemiconductor layer in FIG. 4 according to an exemplary embodiment ofthe inventive concept.

FIG. 13 is a view illustrating a first semiconductor layer in FIG. 4according to an exemplary embodiment of the inventive concept.

FIG. 14 illustrates a first mat in FIG. 13 according to an exemplaryembodiment of the inventive concept.

FIG. 15 is a cross-sectional view taken along line VI-VI′ of FIG. 14according to an exemplary embodiment of the inventive concept.

FIG. 16 is a cross-sectional view taken along line VII-VII′ of FIG. 14,illustrating configurations of the first and second semiconductorlayers, according to an exemplary embodiment of the inventive concept.

FIG. 17 illustrates an example in which the plurality of mats in FIG. 13includes a different number of via areas, according to an exemplaryembodiment of the inventive concept.

FIG. 18 is a cross-sectional view taken along line VIII-VIII′ of FIG. 17according to an exemplary embodiment of the inventive concept.

FIG. 19 illustrates an example in which the plurality of mats in FIG. 13includes a different number of via areas, according to an exemplaryembodiment of the inventive concept.

FIG. 20 illustrates an example in which the plurality of mats in FIG. 13includes a different number of via areas, according to an exemplaryembodiment of the inventive concept.

FIG. 21 illustrates an example in which the plurality of mats in FIG. 13includes a different number of via areas, according to an exemplaryembodiment of the inventive concept.

FIG. 22 illustrates an example in which the plurality of mats in FIG. 13includes a different number of via areas, according to an exemplaryembodiment of the inventive concept.

FIG. 23 illustrates an example in which the plurality of mats in FIG. 13includes a different number of via areas, according to an exemplaryembodiment of the inventive concept.

FIG. 24 illustrates an example in which the plurality of mats in FIG. 13includes a different number of via areas, according to an exemplaryembodiment of the inventive concept.

FIG. 25 illustrates an example in which the plurality of mats in FIG. 13includes a different number of via areas, according to an exemplaryembodiment of the inventive concept.

FIG. 26 is a block diagram illustrating an address decoder in thenonvolatile memory device of FIG. 3 according to an exemplary embodimentof the inventive concept.

FIG. 27 is a block diagram illustrating a solid state disc or solidstate drive (SSD) including nonvolatile memory devices according to anexemplary embodiment of the inventive concept.

DETAILED DESCRIPTION OF THE EMBODIMENTS

Exemplary embodiments of the inventive concept provide a nonvolatilememory device with enhanced performance and reduced size.

Exemplary embodiments of the inventive concept will be described morefully hereinafter with reference to the accompanying drawings. Likereference numerals may refer to like elements throughout thisapplication.

FIG. 1 is a block diagram illustrating a storage device according to anexemplary embodiment of the inventive concept.

Referring to FIG. 1, a storage device (or a memory system) 30 mayinclude a memory controller 40 and a nonvolatile memory device (NVM) 50.

In exemplary embodiments of the inventive concept, each of the memorycontroller 40 and the nonvolatile memory device 50 may be provided inthe form of a chip, a package, or a module. Alternatively, the memorycontroller 40 and the nonvolatile memory device 50 may be mounted onvarious packages to be provided as a storage device such as a memorycard.

The nonvolatile memory device 50 may perform a read operation, an eraseoperation, and a program operation or a write operation under control ofthe memory controller 40. The nonvolatile memory device 50 receives acommand CMD, an address ADDR, and data DATA through input/output linesfrom the memory controller 40 for performing such operations. Inaddition, the nonvolatile memory device 50 receives a control signalCTRL through a control line from the memory controller 40. In addition,the nonvolatile memory device 50 receives a power PWR through a powerline from the memory controller 40.

The nonvolatile memory device 50 may include a memory cell array 100 tostore data DATA and the memory cell array 100 may include a plurality ofmats MT1, MT2, MT3, and MT4 corresponding to different bit-lines.

Memory cells of the nonvolatile memory device 50 may have the physicalcharacteristic where a threshold voltage distribution varies due todifferent causes, such as a program elapsed time, a temperature, programdisturbance, read disturbance, etc. As such, data stored at thenonvolatile memory device 50 may become erroneous (e.g., have errors)due to the above causes. The memory controller 40 may utilize a varietyof error correction techniques to correct such errors. For example, thememory controller 40 may include an error correction code (ECC) engine42.

The memory controller 40 may perform an erase operation on thenonvolatile memory device 50 by sub-block unit, and a sub-block issmaller than one memory block of the nonvolatile memory device 50. As anexample, one memory block may include a plurality of sub-blocks. Thememory controller 40 may include an erase manage module 43 a to managethe erase operation by sub-block unit (e.g., sub-block eraseoperations).

After a sub-block erase operation, the erase manage module 43 a maycheck an erase status of an erased sub-block and/or a sub-block adjacentto the erased sub-block. For example, the erase manage module 43 a maysense memory cells of the erased sub-block to determine whether specificparameters exceed a reference value. The erase manage module 43 a mayread data of sub-block(s) adjacent to the erased sub-block to detecterase-inhibition efficiency. For example, the erase manage module 43 amay detect bit error rate (BER) based on data read from the erasedsub-block. The erase manage module 43 a may acquire and monitorwear-leveling information (e.g., erase count) on the erased sub-block.In addition, the erase manage module 43 a may read data of the erasedsub-block to monitor a variation in threshold voltages of selectedmemory cells and/or a variation in the bit error rate (BER). The erasemanage module 43 a may also read data of an unselected sub-block todetect a variation in a threshold voltage. The memory controller 40 mayperform various procedures to compensate for insufficient erasing of aselected sub-block based on erase status information detected by theerase manage module 43 a.

Generally, a memory block is the maximum memory unit that may be erasedat the same time. In a three-dimensional nonvolatile memory device,where word-lines are stacked in a direction intersecting (e.g.,perpendicular to) a substrate, a memory block may be defined as a groupof cell strings sharing all stacked word-lines. A sub-block correspondsto a sub-memory unit defined by dividing the memory block (or physicalblock) by word line unit or selection line unit. For example, eachsub-block may be formed of memory cells sharing a portion of theword-lines of the memory block.

During a read operation on the nonvolatile memory device 50, the memorycontroller 40 may read data stored at a first page of the nonvolatilememory device 50, using a default read voltage set. The default readvoltage set may include predetermined read voltages. The ECC engine 42may detect and correct errors included in data read from the nonvolatilememory device 50. The ECC engine 42 may perform an ECC operation bydetecting and correcting errors. In exemplary embodiments of theinventive concept, the ECC engine 42 may be implemented in the form ofhardware. The ECC engine 42 may determine error occurrence frequency inthe read data from the nonvolatile memory device 50 by units ofsub-blocks, and may designate a sub-block as a bad sub-block when erroroccurrence frequency is greater than a reference value during apredetermined time.

FIG. 2 is a block diagram illustrating a memory controller in thestorage device of FIG. 1 according to an exemplary embodiment of theinventive concept.

Referring to FIGS. 1 and 2, the memory controller 40 may include aprocessor 41, the ECC engine 42, the buffer 43, the erase manage module43 a, a randomizer 44, a host interface 45, a read only memory (ROM) 46,and a nonvolatile memory interface 47 which are connected via a bus 48.The ECC engine 42 and the erase manage module 43 a are described withreference to FIG. 1, and a description thereof is thus omitted.

The processor 41 controls an overall operation of the memory controller40. In exemplary embodiments of the inventive concept, the erase managemodule 43 a may be implemented in software and stored in the buffer 43.The erase manage module 43 a stored in the buffer 43 may be driven bythe processor 41. The ROM 46 stores a variety of information in firmwarefor the memory controller 40 to operate. The buffer 43 may store dataprovided from the nonvolatile memory device 50 and may include the erasemanage module 43 a.

The randomizer 44 randomizes data to be stored in the nonvolatile memorydevice 50. For example, the randomizer 44 may randomize data to bestored in the nonvolatile memory device 50 in units of word-lines.

Data randomizing is to process data such that program states of memorycells connected to a word-line have the same ratio. For example, ifmemory cells connected to one word-line are multi-level cells (MLC) eachstoring 2-bit data, each of the memory cells has one of an erase stateand first through third program states. In this case, the randomizer 44randomizes data such that in memory cells connected to one word-line,the number of memory cells having the erase state, the number of memorycells having the first program state, the number of memory cells havingthe second program state, and the number of memory cells having thethird program state are substantially the same as one another. Forexample, memory cells in which randomized data is stored have programstates of which the number is equal to one another. The randomizer 44also de-randomizes data read from the nonvolatile memory device 50.

The memory controller 40 communicates with an external host 20 throughthe host interface 45. For example, the host interface 45 may includeUniversal Serial Bus (USB), Multimedia Card (MMC), embedded-MMC,peripheral component interconnect (PCI), PCI-express, AdvancedTechnology Attachment (ATA), Serial-ATA, Parallel-ATA, small computersmall interface (SCSI), enhanced small disk interface (ESDI), IntegratedDrive Electronics (IDE), Mobile Industry Processor Interface (MIN),non-volatile memory express (NVMe), Universal Flash Storage (UFS), etc.The memory controller 40 communicates with the nonvolatile memory device50 through the nonvolatile memory interface 47.

FIG. 3 is a block diagram illustrating a nonvolatile memory device inthe storage device of FIG. 1 according to an exemplary embodiment of theinventive concept.

Referring to FIG. 3, the nonvolatile memory device 50 includes thememory cell array 100, an address decoder 600, a page buffer circuit410, a data input/output (I/O) circuit 420, a control circuit 500, and avoltage generator 700.

The memory cell array 100 may be coupled to the address decoder 600through a string selection line SSL, a plurality of word-lines WLs, anda ground selection line GSL. In addition, the memory cell array 100 maybe coupled to the page buffer circuit 410 through a plurality ofbit-lines BLs.

The memory cell array 100 may include the plurality of mats MT1, MT2,MT3, and MT4 corresponding to different bit-lines. The memory cell array100 may include a plurality of memory cells coupled to the plurality ofword-lines WLs and the plurality of bit-lines BLs. Each of the pluralityof mats MT1, MT2, MT3, and MT4 may include a plurality of memory blocksBLK1 through BLKz (where z is an integer greater than two), and eachmemory block may have a planar structure or a three-dimensional (3D)structure. The memory cell array 100 may include a single-level cellblock including single-level cells (SLC), a multi-level cell blockincluding multi-level cells (MLC), a triple-level cell block includingtriple-level cells (TLC), or a quad-level cell block includingquad-level cells (QLC). For example, some memory blocks from among thememory blocks BLK1 through BLKz may be single-level cell blocks, andother memory blocks may be multi-level cell blocks, triple-level cellblocks, or quad-level cell blocks.

In exemplary embodiments of the inventive concept, the memory cell array100 may include a vertical structure located on an upper substrate. Forexample, the vertical structure may include a plurality of via areas,and in the via areas, one or more first through-hole vias spaced apartin a second direction are provided. The plurality of mats MT1, MT2, MT3,and MT4 may be formed in a cell region adjacent to a pad region. Theplurality of mats MT1, MT2, MT3, and MT4 may include different numbersof via areas according to a distance from the pad region in a firstdirection crossing (e.g., perpendicular to) the second direction.

The control circuit 500 may receive the command (signal) CMD and theaddress (signal) ADDR from the memory controller 40, and control anerase operation, a program operation, and a read operation of thenonvolatile memory device 50 based on the command signal CMD and theaddress signal ADDR.

In exemplary embodiments of the inventive concept, the control circuit500 may generate control signals CTLs, which are used for controllingthe voltage generator 700, based on the command signal CMD, and generatea row address R_ADDR and a column address C_ADDR based on the addresssignal ADDR. The control circuit 500 may provide the row address R_ADDRto the address decoder 600 and provide the column address C_ADDR to thedata input/output circuit 420. The control circuit 500 may also providethe address decoder 600 with a meta signal MTS associated with anattribute of the data to be stored.

The address decoder 600 may transfer voltages to the string selectionline SSL, the plurality of word-lines WLs, and the ground selection lineGSL for operating memory cells of the memory cell array 100 in responseto the address signal ADDR and the command signal CMD received from thememory controller 40 by receiving various word-line voltages VWLs fromthe voltage generator 700. The voltage generator 700 may provide theword-line voltages VWLs to the address decoder 600 to the memory cellarray 100 in response to control signals CTLs received from the controlcircuit 500. The address decoder 600 may include a first address decoder601 and a second address decoder 603, which will be described in detailbelow.

For example, during the program operation, the voltage generator 700 mayapply a program voltage to a selected word-line and may apply a programpass voltage to the unselected word-lines. In addition, during a programverification operation, the voltage generator 700 may apply a programverification voltage to the selected word-line and may apply averification pass voltage to the unselected word-lines. In addition,during the read operation, the voltage generator 700 may apply a readvoltage to the selected word-line and may apply a read pass voltage tothe unselected word-lines.

The page buffer circuit 410 may be coupled to the memory cell array 100through the plurality of bit-lines BLs. The page buffer circuit 410 mayinclude a plurality of page buffers. The page buffer circuit 410 maytemporarily store data to be programmed in a selected page or data readout from the selected page of the memory cell array 100. The page buffercircuit 410 may include a plurality of page buffers. The page buffercircuit 410 may temporarily store data to be programmed in a selectedpage and may temporarily store data read from the selected page. Thepage buffer circuit 410 may be controlled by a control signal PCTLreceived from the control circuit 500. The page buffer circuit 410 mayinclude a first page buffer circuit 411 and a second page buffer circuit413, which will be described in detail below.

The data input/output circuit 420 may be coupled to the page buffercircuit 410 through data lines DLs. During the program operation, thedata input/output circuit 420 may receive program data DATA (e.g., thedata DATA of FIG. 1) from the memory controller 40 and provide theprogram data DATA to the page buffer circuit 410 based on the columnaddress C_ADDR received from the control circuit 500. During the readoperation, the data input/output circuit 420 may provide read data DATA(e.g., the data DATA of FIG. 1), which are stored in the page buffercircuit 410, to the memory controller 40 based on the column addressC_ADDR received from the control circuit 500.

FIG. 4 is a view illustrating a structure of the nonvolatile memorydevice of FIG. 3 according to an exemplary embodiment of the inventiveconcept.

Hereinafter, D1 denotes a first direction, D2 denotes a second directioncrossing the first direction, and D3 denotes a third direction crossingthe first and second directions.

Referring to FIG. 4, the nonvolatile memory device 50 may include afirst semiconductor layer L1 and a second semiconductor layer L2. Thefirst semiconductor layer L1 may be stacked on the second semiconductorlayer L2 in the third direction. In exemplary embodiments of theinventive concept, the memory cell array 100 may be formed on the firstsemiconductor layer L1, and at least one from among the control circuit500, the address decoder 600, and the page buffer circuit 410 may beformed on the second semiconductor layer L2. For example, variouscircuits may be formed on the second semiconductor layer L2 by formingsemiconductor elements such as transistors and patterns for wiring thesemiconductor elements on a lower substrate of the second semiconductorlayer L2.

After the circuits are formed on the second semiconductor layer L2, thefirst semiconductor layer L1 including the memory cell array 100 may beformed. For example, the first semiconductor layer L1 may include aplurality of upper substrates. The memory cell array 100 may be formedon the first semiconductor layer L1 by forming a plurality of gateconductive layers stacked on each of the upper substrates and aplurality of pillars that pass through the plurality of gate conductivelayers and extend in a vertical direction (e.g., the third direction)perpendicular to a top surface of each of the upper substrates. Inaddition, patterns for electrically connecting the memory cell array 100(e.g., the word-lines WL and the bit-lines BL) and the circuits formedon the second semiconductor layer L2 may be formed on the firstsemiconductor layer L1. For example, the word-lines WL may extend in thefirst direction and may be arranged in the second direction. Inaddition, the bit-lines BL may extend in the second direction and may bearranged in the first direction.

Accordingly, the nonvolatile memory device 100 may have a cell-on-perior cell-over-peri (COP) structure in which the control circuit 500, theaddress decoder 600, the page buffer circuit 410, or various otherperipheral circuits and the memory cell array 100 are arranged in astacked direction (e.g., the third direction).

FIG. 5 is a perspective view illustrating a memory block of FIG. 3according to an exemplary embodiment of the inventive concept.

Referring to FIG. 5, the memory block BLK1 includes structures extendingalong the first to third directions D1˜D3.

A substrate 111 is provided. For example, the substrate 111 may have awell of a first type (e.g., a first conductive type). For example, thesubstrate 111 may have a p-well formed by implanting a group 3 elementsuch as boron (B). For example, the substrate 111 may have a pocketp-well provided in an n-well. In an exemplary embodiment of theinventive concept, the substrate 111 has a p-type well (or a p-typepocket well). However, the conductive type of the substrate 111 is notlimited to the p-type.

A plurality of doping regions 311 to 314 extending along the seconddirection are provided in/on the substrate 111. For example, theplurality of doping regions 311 to 314 may have a second type (e.g., asecond conductive type) different from the first type of the substrate111. In an exemplary embodiment of the inventive concept, the first tofourth doping regions 311 to 314 have an n-type. However, the conductivetype of the first to fourth doping regions 311 to 314 is not limited tothe n-type.

A plurality of insulation materials 112 extending along the firstdirection are sequentially provided along the third direction on aregion of the substrate 111 between the first and second doping regions311 and 312. For example, the plurality of insulation materials 112 areprovided along the third direction spaced apart by a specific distance.Exemplarily, the insulation materials 112 may include an insulationmaterial such as an oxide layer.

A plurality of pillars 113 penetrating the insulation materials alongthe third direction D3 are sequentially disposed along the firstdirection on a region of the substrate 111 between the first and seconddoping regions 311 and 312. For example, the plurality of pillars 113penetrate the insulation materials 112 to contact the substrate 111.

For example, each pillar 113 may include a plurality of materials. Forexample, a channel layer 114 of each pillar 113 may include a siliconmaterial having the first type. For example, the channel layer 114 ofeach pillar 113 may include a silicon material having the same type asthe substrate 111. In an exemplary embodiment of the inventive concept,the channel layer 114 of each pillar 113 includes a p-type silicon.However, the channel layer 114 of each pillar 113 is not limited to thep-type silicon.

An inner material 115 of each pillar 113 includes an insulationmaterial. For example, the inner material 115 of each pillar 113 mayinclude an insulation material such as a silicon oxide. For example, theinner material 115 of each pillar 113 may include an air gap.

An insulation layer 116 is provided along the exposed surfaces of theinsulation materials 112, the pillars 113, and the substrate 111, on aregion between the first and second doping regions 311 and 312.Exemplarily, the insulation layer 116 provided on the exposed surface inthe third direction D3 of the last insulation material 112 may beremoved.

A plurality of first conductive materials 211 to 291 are providedbetween the first and second doping regions 311 and 312 on the exposedsurfaces of the insulation layer 116. For example, the first conductivematerial 211 extending along the first direction is provided between thesubstrate 111 and the insulation material 112 adjacent to the substrate111.

A first conductive material extending along the second direction isprovided between the insulation layer 116 at the top of a specificinsulation material among the insulation materials 112 and theinsulation layer 116 at the bottom of a specific insulation materialamong the insulation materials 112. For example, a plurality of firstconductive materials 221 to 281 extending along the second direction D2are provided between the insulation materials 112 and it may beunderstood that the insulation layer 116 is provided between theinsulation materials 112 and the first conductive materials 221 to 281.The first conductive materials 211 to 291 may include a metal material.The first conductive materials 211 to 291 may include a conductivematerial such as a polysilicon.

Substantially the same structures as those between the first and seconddoping regions 311 and 312 may be provided in a region between thesecond and third doping regions 312 and 313. For example, the regionbetween the second and third doping regions 312 and 313 includes aplurality of insulation materials 112 extending along the seconddirection, a plurality of pillars 113 disposed sequentially along thesecond direction D2 and penetrating the plurality of insulationmaterials 112 along the third direction, an insulation layer 116provided on the exposed surfaces of the plurality of insulationmaterials 112 and the plurality of pillars 113, and a plurality of firstconductive materials 213 to 293 extending along the second direction.The plurality of first conductive materials 213 to 293 between thesecond and third doping regions 312 and 313 may be similar to the firstconductive materials 211 to 291 between the first and second dopingregions 311 and 312.

In a region between the third and fourth doping regions 313 and 314,substantially the same structures as those on the first and seconddoping regions 311 and 312 may be provided. The region between the thirdand fourth doping regions 313 and 314 includes a plurality of insulationmaterials 112 extending along the second direction, a plurality ofpillars 113 disposed sequentially along the second direction andpenetrating the plurality of insulation materials 112 along the thirddirection, an insulation layer 116 provided on the exposed surfaces ofthe plurality of insulation materials 112 and the plurality of pillars113, and a plurality of first conductive materials 213 to 293 extendingalong the second direction. The plurality of first conductive materials213 to 293 between the third and fourth doping regions 313 and 314 maybe similar to the first conductive materials 211 to 291 between thefirst and second doping regions 311 and 312

Drains 320 are provided on the plurality of pillars 113. On the drains320, second conductive materials 331 to 333 extending along the seconddirection are provided. The second conductive materials 331 to 333 aredisposed along the first direction, spaced apart by a specific distance.The second conductive materials 331 to 333 are respectively connected tothe drains 320 in a corresponding region. The drains 320 and the secondconductive materials 331 to 333 extending along the second direction maybe connected through contact plugs.

FIG. 6 is an equivalent circuit diagram illustrating the memory block ofFIG. 5 according to an exemplary embodiment of the inventive concept.

The memory block BLK1 of FIG. 6 may be formed on a substrate in athree-dimensional structure (or a vertical structure). For example, aplurality of memory cell strings included in the memory block BLK1 maybe formed in a direction perpendicular to the substrate.

Referring to FIG. 6, the memory block BLK1 may include memory cellstrings NS11 to NS33 coupled between bit-lines BL1, BL2, and BL3 and acommon source line CSL. Each of the memory cell strings NS11 to NS33 mayinclude a string selection transistor SST, a plurality of memory cellsMC1 to MC12, and a ground selection transistor GST. In FIG.7, each ofthe memory cell strings NS11 to NS33 is illustrated to include twelvememory cells MC1 to MC12. However, the inventive concept is not limitedthereto. In exemplary embodiments of the inventive concept, each of thememory cell strings NS11 to NS33 may include any number of memory cells.

The string selection transistor SST may be connected to correspondingstring selection lines SSL1 to SSL3. The plurality of memory cells MCIto MC12 may be connected to corresponding word-lines WL1 to WL12,respectively. The ground selection transistor GST may be connected tocorresponding ground selection lines GSL1 to GSL3. The string selectiontransistor SST may be connected to corresponding bit-lines BL1, BL2, andBL3, and the ground selection transistor GST may be connected to thecommon source line CSL.

In exemplary embodiments of the inventive concept, dummy memory cellsconnected to a dummy word-line may be coupled between the stringselection transistor SST and the memory cell MC12 and/or coupled betweenthe ground selection transistor GST and the memory cell MC1. Forexample, dummy memory cells may be substantially simultaneously formedwith normal memory cells with the same processes. A dummy memory cellmay be activated by a dummy word-line, but may not have any “data”stored to read from an external device. For instance, data stored in adummy memory cell electrically connected to a dummy word-line may not betransmitted outside of the memory cell array through selection signalsprovided by a column decoder, as is the case for normal memory cells.For instance, a dummy memory cell electrically connected to a dummyword-line may not have any connection to a bit line to transmit datatherebetween as with normal memory cells.

Word-lines (e.g., WL1) having substantially the same height may becommonly connected, and the ground selection lines GSL1 to GSL3 and thestring selection lines SSL1 to SSL3 may be separated. In FIG. 7, thememory block BLK1 is illustrated to be coupled to twelve word-lines WL1to WL12 and three bit-lines BL1 to BL3. However, the inventive conceptis not limited thereto. In exemplary embodiments of the inventiveconcept, the memory cell array 100 may be coupled to any number ofword-lines and bit-lines.

According to exemplary embodiments of the inventive concept, the memoryblock BLK1 is divided into a plurality of sub-blocks, indicated byrepresentative sub-blocks SB1, SB2, and SB3, each sub-block beingsmaller in size than the memory block BLK1. The sub-blocks SB1, SB2, andSB3 may be divided in a word-line direction, as shown in FIG. 6.Alternatively, the sub-blocks SB1, SB2, and SB3 may be divided on thebasis of bit-lines or string selection lines. The sub-blocks SB1, SB2,and SB3 in the memory block BLK1 may be erased independently regardlessof the reference used to divide the memory block BLK1 into sub-blocks.

FIG. 7 illustrates a cell region in which a memory cell array of FIG. 3is formed according to an exemplary embodiment of the inventive concept.

Referring to FIG. 7, a cell region CR includes a plurality of channelholes CH.

A channel hole size, for example, a channel hole diameter, may be variedaccording to positions within the cell region CR. For example, channelholes CH adjacent to first and second edges EDG1 and EDG2 have a lowperipheral density, and thus may have a different diameter from those ofother channel holes CH. A memory block BLKa may be adjacent to the firstedge EDG1, and may be spaced apart from the first edge EDG1 by a firstdistance d11. A memory block BLKb may not be adjacent to the first andsecond edges EDG1 and EDG2, and may be in a center of the cell regionCR, and may be spaced apart from the first edge EDG1 by a seconddistance d12. The second distance d12 may be greater than the firstdistance d11. A first diameter DA1 of a first channel hole CHa includedin the memory block BLKa may be smaller than a second diameter DA2 of asecond channel hole CHb included in the memory block BLKb.

FIGS. 8A and 8B illustrate cross-sections of strings of memory blocks ofFIG. 7, according to exemplary embodiments of the inventive concept.

Referring to FIG. 8A, a pillar including the channel layer 114 and theinternal layer 115 may be formed in the first channel hole CHa includedin the memory block BLKa, and a charge storage layer CS may be formedaround the first channel hole CHa, and the charge storage layer CS mayhave an (oxide-nitride-oxide) ONO structure.

Referring to FIG. 8B, a pillar including the channel layer 114 and theinternal layer 115 may be formed in the second channel hole CHb includedin the memory block BLKb, and a charge storage layer CS may be formedaround the second channel hole CHb, and the charge storage layer CS mayhave an ONO structure.

In an exemplary embodiment of the inventive concept, a thickness of thecharge storage layer CS included in the memory block BLKb may bedifferent from a thickness of the charge storage layer CS included inthe memory block BLKa. Characteristics of memory cells may vary due tothe difference in the channel hole diameters. For example, in a 3Dmemory device having a gate-all-around structure in which a gateelectrode is disposed around a circumference of a channel hole, if achannel hole diameter is reduced, the magnitude of an electric fieldformed between a gate electrode and the channel layer 114 is increased.Thus, program and erase speeds of a memory cell having a relativelysmall channel hole diameter like the first channel hole CHa may behigher than those of a memory cell having a relatively large channelhole diameter like the second channel hole CHb.

Referring back to FIG. 7, a memory block is formed in the cell region CRto include all memory cells corresponding to one page in the firstdirection, e.g., in a word-line direction, and to include some stringsin the second direction, e.g., in a bit-line direction. Thus, eachmemory block extends in the first direction, and channel hole sizes,e.g., channel hole diameters may differ in units of memory blocks. Thus,program and erase speeds of memory cells included in the memory blockBLKa may be higher than program and erase speeds of memory cellsincluded in the memory block BLKb.

FIG. 9 is a block diagram illustrating a control circuit in thenonvolatile memory device of FIG. 3 according to an exemplary embodimentof the inventive concept.

Referring to FIG. 9, the control circuit 500 may include a commanddecoder 510, an address buffer 530, and a control signal generator 540.

The command decoder 510 decodes the command CMD and provides a decodedcommand D_CMD to the control signal generator 540. The address buffer530 receives the address signal ADDR, provides the row address R_ADDR tothe row decoder 600, and provides the column address C_ADDR to the datainput/output circuit 420

The control signal generator 540 receives the decoded command D_CMD,generates the control signals CTLs, the meta signal MTS, and the controlsignal PCTL based on the operation directed by the decoded commandD_CMD, provides the control signals CTLs to the voltage generator 700,provides the control signal PCTL to the page buffer circuit 410, andprovides the meta signal MTS to the address decoder 600. The decodedcommand D_CMD may include meta information associated with attributes ofthe data DATA, and the meta signal MTS may include the meta information.The memory controller 40 may incorporate the meta information in thecommand CMD based on access frequency of the data DATA. The data DATAmay be divided into cold data and hot data. The hot data is accessedwith a first frequency greater than a reference frequency during areference time interval, and the cold data is accessed with a secondfrequency less than or equal to the reference frequency during thereference time interval.

FIG. 10 is a block diagram illustrating a voltage generator in thenonvolatile memory device of FIG. 3 according to an exemplary embodimentof the inventive concept.

Referring to FIG. 10, the voltage generator 700 may include a highvoltage generator 710, and a low voltage generator 730. The voltagegenerator 700 may further include a negative voltage generator 750.

The high voltage generator 710 may generate a program voltage VPGM, aprogram pass voltage VPPASS, a verification pass voltage VVPASS, and aread pass voltage VRPASS according to operations directed by the commandCMD, in response to a first control signal CTL1 of the control signalsCTLs. The program voltage VPGM is applied to the selected word-line, theprogram pass voltage VPPASS, the verification pass voltage VVPASS, andthe read pass voltage VRPASS may be applied to the unselectedword-lines. The first control signal CTL1 may include a plurality ofbits which indicate the operations directed by the command CMD.

The low voltage generator 730 may generate a program verificationvoltage VPV, a read voltage VRD, and an erase verification voltage VEVaccording to operations directed by the command CMD, in response to asecond control signal CTL2 of the control signals CTLs. The programverification voltage VEV, the read voltage VRD, and the eraseverification voltage VEV may be applied to the selected word-lineaccording to operation of the nonvolatile memory device 50. The secondcontrol signal CTL2 may include a plurality of bits which indicate theoperations directed by the command CMD.

The negative voltage generator 750 may generate a program verificationvoltage VPV′, a read voltage VRD′, and an erase verification voltageVEV′ which have negative levels according to operations directed by thecommand CMD, in response to a third control signal CTL3 of the controlsignals CTLs. The third control signal CTL3 may include a plurality ofbits which indicate the operations directed by the command CMD.

FIG. 11 is a plan view illustrating an upper surface of a secondsemiconductor layer in FIG. 4 according to an exemplary embodiment ofthe inventive concept.

Referring to FIGS. 3, 4, and 11, the second semiconductor layer L2 maybe divided into first through fourth regions R1 through R4 by a firstvirtual line X0-X0′ in the first direction substantially parallel to theword-lines WL and a second virtual line Y0-Y0′ in the second directionsubstantially parallel to the bit-lines BL. In other words, the firstthrough fourth regions R1 through R4 are divided along the first andsecond directions intersecting at a point overlapping the memory cellarray 100 in the third direction.

The first mat MT1 may be disposed in an upper portion of the firstregion R1, the second mat MT2 may be disposed in an upper portion of thesecond region R2, the third mat MT3 may be disposed in an upper portionof the third region R3, and the fourth mat MT4 may be disposed in anupper portion of the fourth region R4.

A first address decoder 601 and a first page buffer circuit 411 may bedisposed in the first region R1 and may be electrically connected to thefirst mat MT1. A second address decoder 603 and a second page buffercircuit 413 may be disposed in the second region R2 and may beelectrically connected to the second mat MT2. A third address decoder605 and a third page buffer circuit 415 may be disposed in the thirdregion R3 and may be electrically connected to the third mat MT3. Afourth address decoder 607 and a fourth page buffer circuit 417 may bedisposed in the fourth region R4 and may be electrically connected tothe fourth mat MT4. In FIG. 11, it is illustrated that one addressdecoder and one page buffer circuit are disposed in each of the first tofourth regions R1 to R4, but the inventive concept is not limitedthereto. In exemplary embodiments of the inventive concept, a pluralityof address decoders and a plurality of page buffer circuits may bedisposed in each of the first to fourth regions R1 to R4.

The control circuit (CCT) 500 may be disposed in a certain region of thesecond semiconductor layer L2. The control circuit 500 may be connectedto the first to fourth address decoders 601, 603, 605, and 607 and tothe first to fourth page buffer circuit 411, 413, 415, and 417. In FIG.11, the control circuit 500 is illustrated as being disposed in thecenter region of the second semiconductor layer L2, but the inventiveconcept is not limited thereto. In exemplary embodiments of theinventive concept, the control circuit 500 may be disposed in at leastone of the first through fourth regions R1 through R4.

FIG. 12 is a plan view illustrating an upper surface of the secondsemiconductor layer in FIG. 4 according to an exemplary embodiment ofthe inventive concept.

Referring to FIGS. 3, 4, and 12, a second semiconductor layer L2 a maybe divided into the first through fourth regions R1 through R4 by thefirst virtual line X0-X0′ in the first direction substantially parallelto the word-lines WL and the second virtual line Y0-Y0′ in the seconddirection substantially parallel to the bit-lines BL.

FIG. 12 differs from FIG. 11 in that each of the first to fourth addressdecoders 601, 603, 605, and 607 and each of the first to fourth pagebuffer circuit 411, 413, 415, and 417 are disposed adjacent to edgeportions of a respective one of the first to fourth regions R1 to R4.

FIG. 13 is a view illustrating a first semiconductor layer in FIG. 4according to an exemplary embodiment of the inventive concept.

Referring to FIGS. 3, 4, and 13, the first semiconductor layer L1 mayinclude the cell region CR and a pad region PRG which are adjacent toeach other in the first direction.

The memory cell array 100 in FIG. 3 may be disposed in the cell regionCR and the cell region CR may include the plurality of mats MT1, MT2,MT3, and MT4.

The pad region may include a plurality of input/output (I/O) padsDP1˜DPr and at least one power pad, e.g., power pads 761 and 763. Aground voltage GND may be provided to the mats MT1, MT2, MT3, and MT4through the power pad 761 and a power supply voltage EVC may be providedto the mats MT1, MT2, MT3, and MT4 through the power pad 763. Theplurality of I/O pads DP1˜DPr may be disposed in the second directionbetween a first edge portion EG11 and a second edge portion EG12 of thepad region PRG, and the power pads 761 and 763 may be disposed adjacentto the first edge portion EG11.

FIG. 14 illustrates a first mat in FIG. 13 according to an exemplaryembodiment of the inventive concept.

Referring to FIGS. 13 and 14, the first mat MT1 may be located on thefirst semiconductor layer L1, and the first mat MT1 may include a firstvertical structure VS1 and a second vertical structure VS2. As shown inFIG. 14, the first mat MT1 may include a plurality of memory blocksBLKa˜BLKq formed as the first and second vertical structures VS1 andVS2. The memory blocks BLK1˜BLKq may be arranged in the seconddirection. Each of the memory blocks BLKa˜BLKq may include a firstsub-block and a second sub-block. The memory block BLKa includes a firstsub-block SBa1 and a second sub-block SBa2. The memory block BLKiincludes a first sub-block SBi1 and a second sub-block SBi2. The memoryblock BLKq includes a first sub-block SBq1 and a second sub-block SBq2.

As shown in FIG. 14, the first vertical structure VS1 may include aplurality of first sub-blocks of the memory blocks BLKa˜BLKq and aplurality of first via areas EVA11, VA11, VA12, and EVA12 which arespaced apart in the second direction. In addition, the second verticalstructure VS2 may include a plurality of second sub-blocks of the memoryblocks BLKa˜BLKq and a plurality of second via areas EVA21, VA21, VA22,and EVA22 which are spaced apart in the second direction. The firstsub-blocks may be arranged among the first via areas EVA11, VA11, VA12,and EVA12, and the second sub-blocks may be arranged among the secondvia areas EVA21, VA21, VA22, and EVA22.

The first via areas EVA11 and EVA12 adjacent to edges in the seconddirection and in the first sub-blocks may be referred to as first andsecond edge via areas, respectively. The first via areas EVA21 and EVA22adjacent to edges in the second direction and in the second sub-blocksmay be referred to as third and fourth edge via areas, respectively.

For example, in the first via areas VA11 and VA12, one or more firstthrough-hole vias that each pass through the first vertical structureVS1 and are connected to the first page buffer circuit 411 may beformed. In addition, in the second via areas VA21 and VA22, one or moresecond through-hole vias that each pass through the second verticalstructure VS22 and are connected to the second page buffer circuit 413may be formed.

For example, in the first and second edge via areas EVA11 and EVA12, oneor more edge through-hole vias that each pass through the first verticalstructure VS1 and are connected to the first address decoder 601 may beformed. In addition, in the third and fourth edge via areas EVA21 andEVA22, one or more edge through-hole vias that each pass through thesecond vertical structure VS22 and are connected to the second addressdecoder 603 may be formed.

FIG. 15 is a cross-sectional view taken along line VI-VI′ of FIG. 14according to an exemplary embodiment of the inventive concept. Forexample, FIG. 15 is a cross-sectional view taken along line VI-VI′ ofFIG. 14, illustrating configurations of the first and secondsemiconductor layers.

Referring to FIG. 15, the second semiconductor layer L2 may include alower substrate L_SUB, and the second address decoder 603 and the secondpage buffer circuit 413 formed on the lower substrate L_SUB. Inaddition, the second semiconductor layer L2 may include a plurality offirst lower contacts LMC1 electrically connected to the second addressdecoder 603, a first lower conductive line PM1 electrically connected tothe plurality of first lower contacts LMC1, and a lower insulating layerIL1 covering the plurality of first lower contacts LMC1 and the firstlower conductive line PM1.

The second address decoder 603 and the second page buffer circuit 413may be formed on portions of the lower substrate L_SUB. In other words,the second address decoder 603 and/or the second page buffer circuit 413may be formed by forming a plurality of transistors TR on the lowersubstrate L_SUB.

The first semiconductor layer L1 may include a first upper substrateU_SUB_1, a second upper substrate U_SUB_2, the first vertical structureVS1 located on the first upper substrate U_SUB_1, and the secondvertical structure VS2 located on the second upper substrate U_SUB_2. Inaddition, the first semiconductor layer L1 may include a plurality offirst upper contacts UMC1, a plurality of first bit-lines BL_1, aplurality of first edge contacts EC1, and a plurality of first upperconductive lines UPM1 which are electrically connected to the firstvertical structure VS1. In addition, the first semiconductor layer L1may include a plurality of second upper contacts UMC2, a plurality ofsecond bit-lines BL_2, a plurality of second edge contacts EC2, and aplurality of second upper conductive lines UPM2 which are electricallyconnected to the second vertical structure VS2. In addition, the firstsemiconductor layer L1 may include an upper insulating layer IL2covering the first and second vertical structures VS1 and VS2 andvarious conductive lines.

The first and second upper substrates U_SUB_1 and U_SUB_2 may be supportlayers that respectively support first and second gate conductive layersGS__1 and GS_2. The first and second upper substrates U_SUB_1 andU_SUB_2 may be, for example, base substrates.

The first vertical structure VS1 may include the first gate conductivelayers GS__1 located on the first upper substrate U_SUB_1, and aplurality of pillars P1 that pass through the first gate conductivelayers GS__1 and extend in the third direction on a top surface of thefirst upper substrate U_SUB_1. The first gate conductive layers GS__1may include a ground selection line GSL_1, word-lines WL1_1 throughWL4_1, and a string selection line SSL_1. The ground selection lineGSL_1, the word-lines WL1_1 through WL4_1, and the string selection lineSSL__1 may be sequentially formed on the first upper substrate U_SUB_1,and an insulating layer 52 may be located under or over each of thefirst gate conductive layers GS_1.

Each of the plurality of pillars P1 may include a surface layer S1 andan inside I1. For example, the surface layer S1 of each of the pillarsP1 may include a silicon material doped with an impurity, or a siliconmaterial not doped with an impurity.

For example, the ground selection line GSL__1 and a portion of thesurface layer Si adjacent to the ground selection line GSL__1 mayconstitute the ground selection transistor GST (see FIG. 6). Inaddition, the word-lines WL1_1 through WL4_1 and a portion of thesurface layer S1 adjacent to the word-lines WL1_1 through WL4_1 mayconstitute the memory cells MC1˜MC8 (see FIG. 6). In addition, thestring selection line SSL__1 and a portion of the surface layer S1adjacent to the string selection line SSL__1 may constitute the stringselection transistor SST (see FIG. 6).

A drain region DR1 may be formed on the pillar P1. For example, thedrain region DR1 may include a silicon material doped with an impurity.An etch-stop film 53 may be formed on a side wall of the drain regionDR1.

The first vertical structure VS1 may include an edge region EG1. Asshown in FIG. 15, a cross-section of the edge region EG1 may form astepped pad structure. The stepped pad structure may be referred to as a“word line pad”. The plurality of first edge contacts EC1 may beconnected to the edge region EG1, and an electrical signal may beapplied from a peripheral circuit such as the second address decoder 603through the first edge contacts EC1. For example, a contact plug MCP1that passes through the first vertical structure VS1, the first uppersubstrate U_SUB_1, and a part of the second semiconductor layer L2 mayhave one side connected to the first lower conductive line PM1 and theother side electrically connected to the edge region EG1 through thefirst upper conductive lines UPM1. The contact plug MCP1 may include aninsulating film pattern IP1 and a conductive pattern MP1.

At least some of the first edge contacts EC1 may pass through parts ofthe first and second semiconductor layers L1 and L2 in the thirddirection between the first and second upper substrates U_SUB_1 andU_SUB_2 and may have one side electrically connected to a contact plug(e.g., MCP1) connected to the lower conductive line (e.g., PM1).

Since the first and second vertical structures VS1 and VS2 havecorresponding configurations in the cross-sectional view taken alongline VI-VI′ of the first memory block BLK1 of FIG. 15, a repeatedexplanation of elements of the second vertical structure VS2corresponding to those of the first vertical structure VS1 may not begiven.

The second vertical structure VS2 may include a plurality of pillars P2that pass through the second gate conductive layers GS_2. Each of thepillars P2 may include a surface layer S2 and an inside 12. The secondgate conductive layers GS_2 may include a ground selection line GSL_2,word lines WL1_2 through WL4_2, and a string selection line SSL_2. Aninsulating layer 62 may be located under or over each of the second gateconductive layers GS_2.

A drain region DR2 may be formed on the pillar P2. An etch-stop film 63may be formed on a side wall of the drain region DR2. The secondvertical structure VS2 may include an edge region EG2. A contact plugMCP2 that passes through the second vertical structure VS2, the secondupper substrate U_SUB_2, and a part of the second semiconductor layer L2may have one side connected to the first lower conductive line PM1 andthe other side electrically connected to the edge region EG2 through thesecond upper conductive lines UPM2. The contact plug MCP2 may include aninsulating film pattern IP2 and a conductive pattern MP2.

FIG. 16 is a cross-sectional view taken along line VII-VII′ of FIG. 14,illustrating configurations of the first and second semiconductorlayers, according to an exemplary embodiment of the inventive concept.For example, FIG. 16 may be a cross-sectional view illustrating thesecond semiconductor layer L2 overlapping the via areas VA_11 and VA21provided in the first semiconductor layer L1. A repeated explanation ofthe same elements in FIG. 15 may not be given in FIG. 16.

Referring to FIG. 16, a plurality of through-hole vias THV1 passingthrough the first vertical structure VS1, the first upper substrateU_SUB_1, and a part of the second semiconductor layer L2 may be formedin the first via area VA11. Each of the through-hole vias THV1 mayinclude an insulating film pattern IP4 and a conductive pattern MP4. Aplurality of through-hole vias THV2 passing through the second verticalstructure VS2, the second upper substrate U_SUB_2, and a part of thesecond semiconductor layer L2 may be formed in the second via area VA21.Each of the through-hole vias THV2 may include an insulating filmpattern IP3 and a conductive pattern MP3.

As shown in FIG. 16, each of the through-hole vias THV2 may electricallyconnect the second page buffer circuit 413 and the second upper contactUMC2 and each of the through-hole vias THV2 may electrically connect thesecond page buffer circuit 413 and the first upper contact UMC1. Thefirst upper contact UMC1 may be connected to the first bit-line BL_1 andthe second upper contact UMC2 may be connected to the second bit-lineBL_2. In other words, the first bit-lines BL_1 may be electricallyconnected to the second page buffer circuit 413 formed on the secondsemiconductor layer L2 through the plurality of through-hole vias THV1formed in the first via area VA11 and the second bit-lines BL_2 may beelectrically connected to the second page buffer circuit 413 formed onthe second semiconductor layer L2 through the plurality of through-holevias THV2 formed in the second via area VA21. In exemplary embodimentsof the inventive concept, conductive patterns such as contacts may notbe formed in an edge region EG_V1 of the first via area VA11 and in anedge region EG_V2 of the second via area VA21.

In exemplary embodiments of the inventive concept, in FIGS. 14 through16, the first upper substrate U_SUB_1 and the second upper substrateU_SUB_2 may be connected to each other to form an upper substrate, andthe first vertical structure VS1 and the second vertical structure VS2may be connected to each other to form a vertical structure.

FIG. 17 illustrates an example in which the plurality of mats in FIG. 13includes a different number of via areas, according to an exemplaryembodiment of the inventive concept.

Referring to FIG. 17, the cell region CR, adjacent to the pad region PRGin the first direction, includes the plurality of mats MT11, MT12, MT13,and MT14. A first mat MT11 and a second mat MT12 may include a differentnumber of via areas according to a distance from the pad region PRG inthe first direction. A third mat MT13 and a fourth mat MT14 may includea different number of via areas according to a distance from the padregion PRG in the first direction.

A first distance from the pad region PRG to the first mat MT11 in thefirst direction is smaller than a reference distance dl and the firstmat MT11 includes a first number of via areas VA11 a and VA11 b. Asecond distance from the pad region PRG to the second mat MT12 in thefirst direction is greater than or equal to the reference distance dland the second mat MT12 includes a second number of via areas VA12 a,VA12 b, VA12 c, and VA12 d.

The first distance from the pad region PRG to the third mat MT13 in thefirst direction is smaller than the reference distance dl and the thirdmat MT13 includes a first number of via areas VA13 a and VA13 b. Thesecond distance from the pad region PRG to the fourth mat MT14 in thefirst direction is greater than or equal to the reference distance dland the fourth mat MT14 includes a second number of via areas VA14 a,VA14 b, VA14 c, and VA14 d.

Here, the first number may be smaller than the second number. A numberof via areas included in each of the first through fourth mats MT11,MT12, MT13, and MT14 may be determined based on power requirement andsignal routings of each of the first through fourth mats MT11, MT12,MT13, and MT14, or may be determined based on a voltage drop of an upperpower line due to resistance with respect to the pad region PRG.

FIG. 18 is a cross-sectional view taken along line VIII-VIII′ of FIG. 17according to an exemplary embodiment of the inventive concept. FIG. 18illustrates configurations of the first and second semiconductor layers.

Referring to FIG. 18, a metal region UMR is provided in the firstsemiconductor layer L1, and the pad region PRG and power/signal deliveryregion PW/SG are provided above the metal region UMR. In addition, adifferent number of through-hole vias THVa˜THVf are provided in thefirst semiconductor layer L1 and the second semiconductor layer L2according to a distance from the pad region PRG in the first directionwith respect to a mat boundary MTBR.

The through-hole via THVa is connected to a lower conductive line PM4.The through-hole via THVb is connected to the second address decoder 603through a lower conductive line PM51 and a lower contact LMC31, and thethrough-hole via THVc is connected to the second address decoder 603through a lower conductive line PM52 and a lower contact LMC32. Thethrough-hole via THVd is connected to a lower conductive line PM53. Thethrough-hole via THVe is connected to a lower conductive line PM54 andthe through-hole via THVe is connected to the second page buffer circuit413 through a lower conductive line PM55 and a lower contact LMC2. Thelower conductive line PM55 may include the insulating film pattern IP3and the conductive pattern MP3.

FIG. 19 illustrates an example in which the plurality of mats in FIG. 13includes a different number of via areas, according to an exemplaryembodiment of the inventive concept.

Referring to FIG. 19, the cell region CR, adjacent to the pad region PRGin the first direction, includes a plurality of mats MT21, MT22, MT23,and MT24. A first mat MT21 and a second mat MT22 may include a differentnumber of via areas according to a distance from the pad region PRG inthe first direction. A third mat MT23 and a fourth mat MT24 may includea different number of via areas according to a distance from the padregion PRG in the first direction.

A first distance from the pad region PRG to the first mat MT21 in thefirst direction is smaller than the reference distance dl and the firstmat MT21 includes a first number of via areas VA21 a, VA21 b, VA21 c,and VA21 d. A second distance from the pad region PRG to the second matMT22 in the first direction is greater than or equal to the referencedistance dl and the second mat MT22 includes a second number of viaareas VA22 a and VA22 b.

The first distance from the pad region PRG to the third mat MT23 in thefirst direction is smaller than the reference distance d1 and the thirdmat MT23 includes a first number of via areas VA23 a, VA23 b, VA23 c,and VA24 d. The second distance from the pad region PRG to the fourthmat MT24 in the first direction is greater than or equal to thereference distance dl and the fourth mat MT24 includes a second numberof via areas VA24 a and VA24 b.

Here, the first number may be greater than the second number. Thecontrol circuit 500 in FIG. 3 may store hot data in at least one of thefirst mat MT21 and the third mat MT23, and may store cold data in atleast one of the second mat MT22 and the fourth mat MT24 based on accessfrequency of the data. The hot data is accessed with a first frequencygreater than a reference frequency during a reference time interval, andthe cold data is accessed with a second frequency less than or equal tothe reference frequency during the reference time interval.

FIG. 20 illustrates an example in which the plurality of mats in FIG. 13includes a different number of via areas, according to an exemplaryembodiment of the inventive concept.

Referring to FIG. 20, the cell region CR, adjacent to the pad region PRGin the first direction, includes a plurality of mats MT31, MT32, MT33,and MT34. A first mat MT31 includes a first tile TL11 and a second tileTL12 which are identified according to a distance from the pad regionPRG in the first direction. A second mat MT32 includes a first tile TL21and a second tile TL22 which are identified according to a distance fromthe pad region PRG in the first direction. A third mat MT33 includes afirst tile TL31 and a second tile TL32 which are identified according toa distance from the pad region PRG in the first direction. A fourth matMT34 includes a first tile TL41 and a second tile TL42 which areidentified according to a distance from the pad region PRG in the firstdirection. Each of the first tiles TL11, TL21, TL31, and TL41 and eachof the second tiles TL12, TL22, TL32, and TL42 may include a differentnumber of via areas according to the distance from the pad region PRG inthe first direction.

For example, a first distance from the pad region PRG to the first tileTL11 in the first direction is smaller than a reference distance d2 andthe first tile TL11 includes a first number of via areas VA3 la and VA3lb. A second distance from the pad region PRG to the second tile TL12 inthe first direction is greater than or equal to the reference distanced2 and the second tile TL12 includes a second number of via areas VA32a, VA32 b, VA32 c, and VA32 d.

Here, the first number may be smaller than the second number. A numberof via areas included in each of the first tile TL11 and the second tileTL12 may be determined based on power requirement and signal routings ofeach of the first tile TL11 and the second tile TL12, or may bedetermined based on a voltage drop of an upper power line due toresistance with respect to the pad region PRG.

FIG. 21 illustrates an example in which the plurality of mats in FIG. 13includes a different number of via areas, according to an exemplaryembodiment of the inventive concept.

Referring to FIG. 21, the cell region CR, adjacent to the pad region PRGin the first direction, includes a plurality of mats MT31 a, MT32 a,MT33 a, and MT34 a. A first mat MT31 a includes a first tile TL11 a anda second tile TL12 a which are identified according to a distance fromthe pad region PRG in the first direction. A second mat MT32 a includesa first tile TL21 a and a second tile TL22 a which are identifiedaccording to a distance from the pad region PRG in the first direction.A third mat MT33 a includes a first tile TL31 a and a second tile TL32 awhich are identified according to a distance from the pad region PRG inthe first direction. A fourth mat MT34 a includes a first tile TL41 aand a second tile TL42 a which are identified according to a distancefrom the pad region PRG in the first direction. Each of the first tilesTL11 a, TL21 a, TL31 a, and TL41 a, and each of the second tiles TL12 a,TL22 a, TL32 a, and TL42 a may include a different number of via areasaccording to the distance from the pad region PRG in the firstdirection.

For example, a first distance from the pad region PRG to the first tileTL11 a in the first direction is smaller than the reference distance d2,and the first tile TL11 a includes a first number of via areas VA33 a,VA33 b, VA33 c, and VA33 d. A second distance from the pad region PRG tothe second tile TL12 a in the first direction is greater than or equalto the reference distance d2 and the second tile TL12 a includes asecond number of via areas VA34 a and VA34 b.

Here, the first number may be greater than the second number. Thecontrol circuit 500 in FIG. 3 may store hot data in the first tile TL11a and may store cold data in the second tile TL12 a.

FIG. 22 illustrates an example in which the plurality of mats in FIG. 13includes a different number of via areas, according to an exemplaryembodiment of the inventive concept.

Referring to FIG. 22, the cell region CR, adjacent to the pad region PRGin the first direction, includes a plurality of mats MT41, MT42, MT43,and MT44. The pad region PRG includes the power pads 761 and 763disposed adjacent to the first edge portion EG11. The ground voltage GNDmay be provided to the mats MT41, MT42, MT43, and MT44 through the powerpad 761 and the power supply voltage EVC may be provided to the matsMT41, MT42, MT43, and MT44 through the power pad 763.

A first mat MT41 and a third mat MT43 may include a different number ofvia areas according to a distance from the power pad 763 in the seconddirection. A second mat MT42 and a fourth mat MT44 may include adifferent number of via areas according to a distance from the power pad763 in the second direction.

A first distance from the power pad 763 or the first edge portion EG11to the third mat MT43 in the second direction is smaller than areference distance d3, and the third mat MT43 includes a first number ofvia areas VA43 a and VA43 b. A second distance from the power pad 763 orthe first edge portion EG11 to the first mat MT41 in the seconddirection is greater than or equal to the reference distance d3 and thefirst mat MT41 includes a second number of via areas VA41 a, VA41 b,VA41 c, and VA41 d.

The first distance from the power pad 763 or the first edge portion EG11to the fourth mat MT44 in the second direction is smaller than thereference distance d3 and the fourth mat MT44 includes a first number ofvia areas VA44 a and VA44 b. The second distance from the power pad 763or the first edge portion EG11 to the second mat MT42 in the seconddirection is greater than or equal to the reference distance d3 and thesecond mat MT42 includes a second number of via areas VA42 a, VA42 b,VA42 c, and VA42 d. Here, the first number may be smaller than thesecond number.

FIG. 23 illustrates an example in which the plurality of mats in FIG. 13includes a different number of via areas, according to an exemplaryembodiment of the inventive concept.

Referring to FIG. 23, the cell region CR, adjacent to the pad region PRGin the first direction, includes a plurality of mats MT51, MT52, MT53,and MT54. The pad region PRG includes the power pads 761 and 763disposed adjacent to the first edge portion EG11. The ground voltage GNDmay be provided to the mats MT51, MT52, MT53, and MT54 through the powerpad 761, and the power supply voltage EVC may be provided to the matsMT51, MT52, MT53, and MT54 through the power pad 763.

A first mat MT51 and a third mat MT53 may include a different number ofvia areas according to a distance from the power pad 763 in the seconddirection. A second mat MT52 and a fourth mat MT54 may include adifferent number of via areas according to a distance from the power pad763 in the second direction.

A first distance from the power pad 763 or the first edge portion EG11to the third mat MT53 in the second direction is smaller than thereference distance d3, and the third mat MT53 includes a first number ofvia areas VA53 a, VA53 b, VA53 c, and VA53 d. A second distance from thepower pad 763 or the first edge portion EG11 to the first mat MT51 inthe second direction is greater than or equal to the reference distanced3 and the first mat MT51 includes a second number of via areas VA51 aand VA51 b.

The first distance from the power pad 763 or the first edge portion EG11to the fourth mat MT54 in the second direction is smaller than thereference distance d3 and the fourth mat MT54 includes a first number ofvia areas VA54 a, VA54 b, VA54 c, and VA54 d. The second distance fromthe power pad 763 or the first edge portion EG11 to the second mat MT52in the second direction is greater than or equal to the referencedistance d3 and the second mat MT52 includes a second number of viaareas VA52 a and VA52 b. Here, the first number may be greater than thesecond number.

The control circuit 500 in FIG. 3 may store hot data in the mat MT53 orthe mat MT54, and may store cold data in the mat MT51 or the mat MT52.

FIG. 24 illustrates an example in which the plurality of mats in FIG. 13includes a different number of via areas, according to an exemplaryembodiment of the inventive concept.

Referring to FIG. 24, the cell region CR, adjacent to the pad region PRGin the first direction, includes a plurality of mats MT61, MT62, MT63,and MT64. The pad region PRG includes the power pads 761 and 763disposed adjacent to the first edge portion EG11. The ground voltage GNDmay be provided to the mats MT61, MT62, MT63, and MT64 through the powerpad 761, and the power supply voltage EVC may be provided to the matsMT61, MT62, MT63, and MT64 through the power pad 763.

The mat MT61 includes a first tile TL51 and a second tile TL52, the matMT62 includes a first tile TL61 and a second tile TL62, the mat MT63includes a first tile TL71 and a second tile TL72, and the mat MT64includes a first tile TL81 and a second tile TL82. The mat MT63 includesthe first tile TL71 and the second tile TL72 which are identifiedaccording to a distance from the power pad 763 or the first edge portionEG11 in the second direction, and the mat MT64 includes the first tileTL81 and the second tile TL82 which are identified according to adistance from the power pad 763 or the first edge portion EG11 in thesecond direction.

A first distance from the power pad 763 or the first edge portion EG11to the second tile TL72 is smaller than a first reference distance d41,and the second tile TL72 includes a first number of via areas VA81 a andVA81 b. The second tile TL82 may also include the first number of viaareas. A second distance from the power pad 763 or the first edgeportion EG11 to the first tile TL71 is greater than or equal to thefirst reference distance d41 and is smaller than a second referencedistance d42, and the first tile TL71 includes a second number of viaareas VA71 a, VA71 b, and VA71 c. The first tile TL81 may also includethe second number of via areas.

A third distance from the power pad 763 or the first edge portion EG11to the first tile TL51 is greater than or equal to the second referencedistance d42, and the first tile TL51 includes a third number of viaareas VA61 a, VA61 b, VA61 c, and VA61 d. A fourth distance from thepower pad 763 or the first edge portion EG11 to the second tile TL52 isgreater than or equal to the second reference distance d42, and thesecond tile TL52 also includes the third number of via areas. The firstand second tiles TL61 and TL62 may each include the third number of viaareas as well. Here, the second number is greater than the first numberand third number is greater than the second number.

FIG. 25 illustrates an example in which the plurality of mats in FIG. 13includes a different number of via areas, according to an exemplaryembodiment of the inventive concept.

Referring to FIG. 25, the cell region CR, adjacent to the pad region PRGin the first direction, includes a plurality of mats MT61 a, MT62 a,MT63 a, and MT64 a. The pad region PRG includes the power pads 761 and763 disposed adjacent to the first edge portion EG11. The ground voltageGND may be provided to the mats MT6 a 1, MT62 a, MT63 a, and MT64 athrough the power pad 761, and the power supply voltage EVC may beprovided to the mats MT61 a, MT62 a, MT63 a, and MT64 a through thepower pad 763.

The mat MT61 a includes a first tile TL51 a and a second tile TL52 a,the mat MT62 a includes a first tile TL61 a and a second tile TL62 a,the mat MT63 a includes a first tile TL71 a and a second tile TL72 a,and the mat MT64 a includes a first tile TL81 a and a second tile TL82a. The mat MT63 a includes the first tile TL71 a and the second tileTL72 a which are identified according to a distance from the power pad763 or the first edge portion EG11 in the second direction, and the matMT64 a includes the first tile TL81 a and the second tile TL82 a whichare identified according to a distance from the power pad 763 or thefirst edge portion EG11 in the second direction.

A first distance from the power pad 763 or the first edge portion EG11to the second tile TL72 a is smaller than the first reference distanced41, and the second tile TL72 a includes a first number of via areasVA82 a, VA82 b, VA82 c, and VA82 d. The second tile TL82 a may alsoinclude the first number of via areas. A second distance from the powerpad 763 or the first edge portion EG11 to the first tile TL71 a isgreater than or equal to the first reference distance d41 and is smallerthan the second reference distance d42, and the first tile TL7 laincludes a second number of via areas VA72 a, VA72 b, and VA72 c. Thefirst tile TL81 a may also include the second number of via areas.

A third distance from the power pad 763 or the first edge portion EG11to the first tile TL51 a is greater than or equal to the secondreference distance d42, and the first tile TL51 a includes a thirdnumber of via areas VA62 a and VA62 b. A fourth distance from the powerpad 763 or the first edge portion EG11 to the second tile TL52 a isgreater than or equal to the second reference distance d42, and thesecond tile TL52 a also includes the third number of via areas.Additionally, the first and second tiles TL61 a and TL62 a may eachinclude the third number of via areas. Here, the first number is greaterthan the second number and second number is greater than the thirdnumber.

The control circuit 500 in FIG. 3 may store hot data in the tiles TL72 aand TL82 a, and may store cold data in the mats MT61 a and MT62 a.

FIG. 26 is a block diagram illustrating an address decoder in thenonvolatile memory device of FIG. 3 according to an exemplary embodimentof the inventive concept.

In FIG. 26, the first mat MT1 and the second mat MT2 of the memory cellarray 100 and the voltage generator 700 are also illustrated.

Referring to FIG. 26, the address decoder 600 includes a decoder 610, afirst switch circuit 620, and a second switch circuit 630. The firstswitch circuit 620 may be included in the first address decoder 601 inFIG. 11, and the second switch circuit 630 may be included in the secondaddress decoder 603 in FIG. 11.

The decoder 610 receives the address ADDR and the meta signal MTS, andgenerates a first mat selection signal MSS1 to select the first mat MT1and a second mat selection signal MSS2 to select the second mat MT2based on at least one mat designated by the address ADDR and the metasignal MTS. The decoder 610 provides the first mat selection signal MSS1and the second mat selection signal MSS2 to the first switch circuit 620and the second switch circuit 630, respectively.

The first switch circuit 620 and the second switch circuit 630 may becoupled to a plurality of selection lines Sls coupled to the voltagegenerator 700. The first switch circuit 620 is coupled to the first matMT1 through at least one string selection line SSL, a plurality ofword-lines WL1˜WLn, and at least one ground selection line GSL. Thesecond switch circuit 630 is coupled to the second mat MT2 through atleast one string selection line SSL, a plurality of word-lines WL1˜WLn,and at least one ground selection line GSL.

The first switch circuit 620 includes a switch controller 621 and aplurality of pass transistors PT11˜PT14 coupled to the string selectionline SSL, the word-lines WL1˜WLn, and the ground selection line GSL ofthe first mat MT1. The switch controller 621 may control turn-on andturn-off of the pass transistors PT11˜PT14 and turn-on timing of thepass transistors PT11˜PT14 via a signal SCSI in response to the firstmat selection signal MSS1.

The second switch circuit 630 includes a switch controller 631 and aplurality of pass transistors PT21˜PT24 coupled to the string selectionline SSL, the word-lines WL1˜WLn, and the ground selection line GSL ofthe second mat MAT2. The switch controller 631 may control turn-on andturn-off of the pass transistors PT21˜PT24 via a signal SCS2 in responseto the second mat selection signal MSS2.

FIG. 27 is a block diagram illustrating a solid state disc or solidstate drive (SSD) including nonvolatile memory devices according to anexemplary embodiment of the inventive concept.

Referring to FIG. 27, a SSD 1000 includes multiple nonvolatile memorydevices 1100 and an SSD controller 1200.

The SSD controller 1200 may be connected to the nonvolatile memorydevices 1100 through multiple channels CH1, CH2, CH3, , , , . CHi. TheSSD controller 1200 may include one or more processors 1210, a buffermemory 1220, an error correction code (ECC) circuit 1230, a hostinterface 1250, and a nonvolatile memory interface 1260.

The buffer memory 1220 may store data used to drive the SSD controller1200. The buffer memory 1220 may include multiple memory lines eachstoring data or a command. The ECC circuit 1230 may calculate errorcorrection code values of data to be programmed during a programoperation, and may correct an error of read data using an errorcorrection code value during a read operation. In a data recoveryoperation, the ECC circuit 1230 may correct an error of data recoveredfrom the nonvolatile memory devices 1100. The host interface 1250 mayprovide an interface with an external device. The nonvolatile memoryinterface 1260 may provide an interface with the nonvolatile memorydevices 1100.

Each of the nonvolatile memory devices 1100 may be the nonvolatilememory device according to exemplary embodiments of the inventiveconcept described above, and may be optionally supplied with an externalhigh voltage VPP.

A nonvolatile memory device or a storage device according to exemplaryembodiments of the inventive concept may be packaged using variouspackage types or package configurations.

The inventive concept may be applied to various electronic devicesincluding a nonvolatile memory device.

Accordingly, a nonvolatile memory device having a cell-over-peri (COP)structure may include a plurality of mats/tiles including a plurality ofvia areas in which through-hole vias are provided, and the through-holevias transfer signal/power to the plurality of mats/tiles. At least someof the mats/tile include a different number of via areas according to adistance from a pad region or a power pad. Therefore, the nonvolatilememory device may have enhanced performance without increasing chipsize.

While the inventive concept has been shown and described with referenceto exemplary embodiments thereof, it will be apparent to those ofordinary skill in the art that various modifications in form and detailsmay be made thereto without departing from the spirit and scope of theinventive concept as set forth by the appended claims.

What is claimed is:
 1. A nonvolatile memory device comprising: a firstsemiconductor layer including an upper substrate in which a plurality ofword-lines extending in a first direction and a plurality of bit-linesextending in a second direction perpendicular to the first direction aredisposed and a memory cell array including a vertical structure on theupper substrate, wherein the vertical structure includes a plurality ofmemory blocks; a second semiconductor layer under the firstsemiconductor layer in a third direction perpendicular to the first andsecond directions, wherein the second semiconductor layer includes alower substrate that includes a plurality of address decoders and aplurality of page buffer circuits configured to control the memory cellarray; a control circuit configured to control the plurality of addressdecoders and the plurality of page buffer circuits in response to acommand and an address from an external device; and a pad regiondisposed adjacent to the first semiconductor layer in the firstdirection and extending in the second direction, wherein the verticalstructure includes a plurality of via areas in which one or morethrough-hole vias are provided and the plurality of via areas are spacedapart in the second direction, wherein the memory cell array includes aplurality of mats corresponding to different bit-lines of the pluralityof bit-lines, and wherein at least two of the plurality of mats includea different number of the via areas according to a distance from the padregion in the first direction.
 2. The nonvolatile memory device of claim1, wherein: the plurality of mats include at least a first mat and asecond mat, a first distance from the pad region to the first mat in thefirst direction is smaller than a reference distance, and a seconddistance from the pad region to the second mat in the first direction isgreater than or equal to the reference distance.
 3. The nonvolatilememory device of claim 2, wherein: the first mat includes a first numberof the via areas, the second mat includes a second number of the viaareas, and the first number is smaller than the second number.
 4. Thenonvolatile memory device of claim 2, wherein: the first mat includes afirst number of the via areas, the second mat includes a second numberof the via areas, and the first number is greater than the secondnumber.
 5. The nonvolatile memory device of claim 4, wherein: thecontrol circuit is configured to selectively store hot data and colddata in the first mat and the second mat based on an access frequencyfrom the external device, the control circuit is configured to store thehot data in the first mat and is configured to store the cold data inthe second mat, the hot data is accessed with a first frequency greaterthan a reference frequency during a reference time interval, and thecold data is accessed with a second frequency less than or equal to thereference frequency during the reference time interval.
 6. Thenonvolatile memory device of claim 1, wherein the second semiconductorlayer comprises first, second, third, and fourth regions that aredivided along the first and second directions intersecting at a pointoverlapping the memory cell array in the third direction, wherein thefirst and second regions are adjacent to each other in the firstdirection, and the second and third regions are adjacent to each otherin the second direction, wherein the plurality of page buffer circuitsinclude first through fourth page buffer circuits located in the firstthrough fourth regions, respectively.
 7. The nonvolatile memory deviceof claim 1, wherein at least a first portion of the one or morethrough-hole vias connect at least some portion of the plurality ofbit-lines to at least some portion of the plurality of page buffercircuits, and wherein at least a second portion of the one or morethrough-hole vias connect at least some portion of the plurality ofword-lines to at least some portion of the plurality of addressdecoders.
 8. A nonvolatile memory device comprising: a firstsemiconductor layer including an upper substrate in which a plurality ofword-lines extending in a first direction and a plurality of bit-linesextending in a second direction perpendicular to the first direction aredisposed and a memory cell array including a vertical structure on theupper substrate, wherein the vertical structure includes a plurality ofmemory blocks; a second semiconductor layer under the firstsemiconductor layer in a third direction perpendicular to the first andsecond directions, wherein the second semiconductor layer includes alower substrate that includes a plurality of address decoders and aplurality of page buffer circuits configured to control the memory cellarray; a control circuit configured to control the plurality of addressdecoders and the plurality of page buffer circuits in response to acommand and an address from an external device; and a pad regiondisposed adjacent to the first semiconductor layer in the firstdirection and extending in the second direction, wherein the verticalstructure includes a plurality of via areas in which one or morethrough-hole vias are provided and the plurality of via areas are spacedapart in the second direction, wherein at least a first portion of theone or more through-hole vias connect at least some portion of theplurality of bit-lines to at least some portion of the plurality of pagebuffer circuits, wherein at least a second portion of the one or morethrough-hole vias connect at least some portion of the plurality ofword-lines to at least some portion of the plurality of addressdecoders, wherein the memory cell array includes a plurality of matscorresponding to different bit-lines of the plurality of bit-lines,wherein each of the plurality of mats includes a first tile and a secondtile which are identified based on a distance from the pad region in thefirst direction, and wherein the first tile and the second tile includea different number of the via areas according to the distance from thepad region in the first direction.
 9. The nonvolatile memory device ofclaim 8, wherein: a first distance from the pad region to the first tilein the first direction is smaller than a reference distance, and asecond distance from the pad region to the second tile in the firstdirection is greater than or equal to the reference distance.
 10. Thenonvolatile memory device of claim 9, wherein: the first tile includes afirst number of the via areas, the second tile includes a second numberof the via areas, and the first number is smaller than the secondnumber.
 11. The nonvolatile memory device of claim 9, wherein: the firsttile includes a first number of the via areas, the second tile includesa second number of the via areas, and the first number is greater thanthe second number.
 12. The nonvolatile memory device of claim 11,wherein: the control circuit is configured to selectively store hot dataand cold data in the first tile and the second tile based on an accessfrequency from the external device, the control circuit is configured tostore the hot data in the first tile and is configured to store the colddata in the second tile, the hot data is accessed with a first frequencygreater than a reference frequency during a reference time interval, andthe cold data is accessed with a second frequency less than or equal tothe reference frequency during the reference time interval.
 13. Anonvolatile memory device comprising: a first semiconductor layerincluding an upper substrate in which a plurality of word-linesextending in a first direction and a plurality of bit-lines extending ina second direction perpendicular to the first direction are disposed anda memory cell array including a vertical structure on the uppersubstrate, wherein the vertical structure includes a plurality of memoryblocks; a second semiconductor layer under the first semiconductor layerin a third direction perpendicular to the first and second directions,wherein the second semiconductor layer includes a lower substrate thatincludes a plurality of address decoders and a plurality of page buffercircuits configured to control the memory cell array; a control circuitconfigured to control the plurality of address decoders and theplurality of page buffer circuits in response to a command and anaddress from an external device; and a pad region disposed adjacent tothe first semiconductor layer in the first direction and extending inthe second direction, wherein a plurality of input/output pads and atleast one power pad are provided in the pad region, wherein the verticalstructure includes a plurality of via areas in which one or morethrough-hole vias are provided and the plurality of via areas are spacedapart in the second direction, wherein the at least one power pad isdisposed adjacent to a first edge portion of the pad region, wherein thememory cell array includes a plurality of mats corresponding todifferent bit-lines of the plurality of bit-lines, and wherein at leasttwo of the plurality of mats include a different number of the via areasaccording to a distance from the at least one power pad in the seconddirection.
 14. The nonvolatile memory device of claim 13, wherein: theplurality of mats include at least a first mat and a second mat, a firstdistance from the at least one power pad to the first mat in the seconddirection is smaller than a first reference distance, and a seconddistance from the at least one power pad to the second mat in the seconddirection is greater than or equal to the first reference distance. 15.The nonvolatile memory device of claim 14, wherein: the first matincludes a first number of the via areas, the second mat includes asecond number of the via areas, and the first number is smaller than thesecond number.
 16. The nonvolatile memory device of claim 14, wherein:the first mat includes a first number of the via areas, the second matincludes a second number of the via areas, and the first number isgreater than the second number.
 17. The nonvolatile memory device ofclaim 16, wherein: the control circuit is configured to selectivelystore hot data and cold data in the first mat and the second mat basedon an access frequency from the external device, the control circuit isconfigured to store the hot data in the first mat and is configured tostore the cold data in the second mat, the hot data is accessed with afirst frequency greater than a reference frequency during a referencetime interval, and the cold data is accessed with a second frequencyless than or equal to the reference frequency during the reference timeinterval.
 18. The nonvolatile memory device of claim 14, wherein: thefirst mat includes a first tile and a second tile which are identifiedbased on the distance in the second direction from the at least onepower pad, the second mat includes a third tile and a fourth tile whichare identified based on the distance in the second direction from the atleast one power pad, a third distance from the at least one power pad tothe first tile in the second direction is smaller than a secondreference distance, and a fourth distance from the at least one powerpad to the second tile in the second direction is greater than or equalto the second reference distance.
 19. The nonvolatile memory device ofclaim 18, wherein: the first tile includes a first number of the viaareas, the second tile includes a second number of the via areas, eachof the third tile and the fourth tile includes a third number of the viaareas, and the second number is greater than the first number and thethird number is greater than the second number.
 20. The nonvolatilememory device of claim 18, wherein: the first tile includes a firstnumber of the via areas, the second tile includes a second number of thevia areas, each of the third tile and the fourth tile includes a thirdnumber of the via areas, and the first number is greater than the secondnumber and the second number is greater than the third number.